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ISRA - Model TEX-Q -Inline Optical Inspection System
The TEX-Q inspection system precisely monitors the cell surface for contamination and defects, while also checking the texturing for homogeneity and reflectivity. It features high-performance line-scan cameras that uncover defects like long-term drifts or overetching of grain boundaries, even at a throughput of several thousand wafers per hour. The cameras can also be fitted beneath the roller transport.
The system reliably monitors the quality of every produced cell, assigning defects to the respective wafer position. The map generated during this process (“Boat View”) then visualizes the potential for optimization in the event of process deviations. As a result, users can quickly counteract any deviations and directly reduce waste. Furthermore, the system enables users to automatically remove wafers that do not meet the classification thresholds, thereby avoiding cost-intensive further processing. TEX-Q offers reliable process monitoring that guarantees efficient production, reduces production costs on the line, and optimizes the quality of the solar wafers produced.
- Even for wafer sizes over 210 mm
- Flexible process integration: Inspection possible on the fly or at idle time
- Boat View: Tracing and localization of process deviations
- Recipe Copy-Exact
- Inspection and classification of MCCE-textured cells
- Inspection on-the-fly directly on the rollers (bottom-up mounting)
- Cumulative defect overlay for identification of systematic faults (handling/processing)
- Image analysis on Cumulative Defect Overlay Image
- MES Interface
- Connection to Central Recipe Management
- Connection to Central Yield Management
- Connection to Central Health Management