Korvus Technology - Model HEX-XL -Larger Mobile Base-stand-mounted System

The HEX Series PVD systems from Korvus Technology are designed to offer modular and versatile solutions for thin-film deposition. The series includes three options: HEX, HEX-L, and HEX-XL, each catering to different application needs. The HEX model serves as a compact, benchtop or rack-mounted system with a capacity to handle 4-inch sample diameters and offers up to three deposition sources. The HEX-L, mounted on a mobile base stand, accommodates 6-inch samples and provides a larger chamber volume with magnetron sputter sizes extending to 3-inch diameters. The HEX-XL is the largest in the series, designed for 12-inch samples with extensive chamber volume, supporting sputtering on up to 4-inch diameters. These systems are equipped with customizable source options including mini E-beam evaporators for sub-monolayer film deposition, RF/DC sputtering capabilities, and the ability to deposit a wide range of materials. The systems are built to achieve ultra-high vacuum conditions and integrate with glovebox setups for specialized application environments.