Korvus Technology - PVD Cluster Systems

Korvus Technology’s PVD cluster system provides a solution to make the thin film deposition process more flexible, cost-effective and efficient. Our HEX PVD systems are unique in their versatility. The highly modular design prioritises customisation and flexibility for manufacturers and researchers using thin film deposition. Staying true to our philosophy of flexibility and upgradability, the “HEX Cluster” from Korvus allows users to begin with a single HEX-L chamber, and then connect further HEX-L chambers later on for in-vacuum transfer of samples between them.