MSP - Model 2940 -Liquid Flow Controller
The Model 2940 is a family of controllers for liquid flow control. Each controller is comprised of a sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the 2800PE series Turbo Vaporizer™. This all-digital flow control system is suitable for maintaining steady liquid flow rate as well as for generating repeatable short duration vapor pulses for ALD applications.
- MSP Corporation offers a complete line of vaporization products for thin film deposition in semiconductor device fabrication and large area industrial coating applications.
- This digital Liquid Flow Controller is designed to work with the 2800PE series Turbo-Vaporizers™ to:
- maintain a steady liquid flow as low as 1 mg/min
- generate short durations pulses with response time as short as 200 ms
- compensate for flow rate variation due to system pressure and temperature changes
Converting a liquid flow into a steady vapor stream is a key step in processes for forming thin films or creating bulk material through surface reaction chemistry. MSP has created a family of Turbo-Vaporizers™ to meet the modern demands of precursor vaporization in semiconductor device fabrication. These vaporizers are used in world’s most advanced semiconductor device fabs for fabricating thin film devices by CVD, PECVD and ALD processes.