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PMS UltraChemModel 40 -Liquid Particle Counter

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Your products need reliable contamination monitoring. You need to detect the smallest particle possible. Now get both – sensitivity to 40 nm particles with the greatest reliability available on the market. If your application requires measuring small particles in chemicals with high molecular scatter, UltraChem® 40 is the best tool for the job. NanoVision Technology® eliminates the competition between the light scattered by fluid molecules and particles. This makes 40 nm sizing possible for the first time. Background and false counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. The result: Data you can act on with confidence.

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Highly reliable particle counter with 40 nm sensitivity for high molecular scatter applications

Without measurement there is no control

Detect Small Particles

  • 40 nm sensitivity
  • Large sample volume for improved data quality

NanoVision Technology®

  • Adaptive technology makes the instrument immune to most
  • optical contamination
  • See what your particle counter sees
  • Measures small particles in a wide range of chemicals, including
  • high molecular scattering fluids. Chemicals include:
    • PGMEA
    • Photoresist solvents
    • HF
    • Sulfuric acid

Low Cost of Operation

  • 3-year warranty on Liquid Particle Counter
  • 1-year warranty on Electronic Flow Controller
  • Solid state laser diode
  • Simple design

Versatile

  • Online or batch sampling capabilities
  • Multiple communication protocols
  • Small footprint allows placement in various locations
  • Compatible with a wide-range of chemicals
  • 40nm sensitivity
  • Chemicals include: PGMEA, photoresist solvents, ydrogen fluoride (HF) and sulfuric acid
  • 3-year warranty
  • Solid state laser diode
  • Simple design
  • Online or batch sampling capabilities
  • Multiple communication protocols
  • DI water monitoring
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography