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AxetrisModel MFC 2172 -Mass Flow Controller

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Compact mass flow controller with EtherCAT interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).

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It offers the following advantages:

  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design
  • High dynamic range > 1000:1
  • High long-term stability
  • Ethernet connectivity with a EtherCAT interface

It is recommended for standalone applications and system integration in industrial, analytical and medial applications where the MFCs need to be integrated into Ethernet-based networks with an EtherCAT communication interface.