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HidenModel RGA Series -Mass Spectrometers for Residual Gas Analysis

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Systems for the examination of components present in a vessel or evolved from a process. All Hiden residual gas analysers are application tested and calibrated to provide the highest quality performance, and they are backed by a 3 year warranty and lifetime service support.

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The Hiden RGA Series includes three specification levels :

HALO RGA  – for residual gas analysis
Suitable for vacuum fingerprint analysis, leak detection and trend analysis

3F Series RGA – triple filter mass spectrometers for analytical applications
Triple filter technology provides extended mass ranges, increased mass resolution, enhanced sensitivity and improved contamination resistance for more demanding analytical applications.

3F-PIC – pulse ion counting detection for fast event studies

Ultra-fast pulse ion counting detection provides seven decade continuous dynamic range with optimum sensitivity at UHV/XHV

  • Mass range options: 50, 100, 200, 300, or 510 amu.
  • Detector options give sensitivity for high vacuum to ultra high vacuum, UHV.
  • Stability (less than ±0.5% height variation over 24 h)
  • MASsoft control via RS232, USB or multiple systems via Ethernet LAN
  • Fast access for Histogram, Trend Analysis and Analog peak displays
  • Mixed mode scanning e.g. Trend, Histogram and Analog peaks in multiple-windows
  • Simultaneous real time display of graphical and tabular trend analysis data
  • Cursor for peak height identification under mouse control
  • Real time background subtract, Automatic mass scale alignment
  • Data export facility to ASCII format and to all Windows devices
  • netMASsoft, an on board web server for RGA operation from your Web browser
  • Mass range: 50,100, 200, 300 or 510 amu
  • Minimum detectable concentration (HALO): 2X10-13 mbar
  • Minimum detectable concentration (3F): 2X10-14 mbar
  • Minimum detectable concentration (3F-PIC): 2X10-15 mbar
  • Ion Source: Range of electron impact ion source types available
  • Ion Source control: Yes
  • Electron emission: Software variable 1µA to 2mA
  • Electron energy: Software variable 0V to 150 eV
  • Ion energy: Software variable 0V to 10 eV
  • Detector: Faraday cup and electron multiplier
  • Mounting flange (HALO): DN-35-CF (2.75″/70mm OD Conflat type)
  • Mounting flange (3F – Triple Filter): DN-63-CF (4.5”/114mm OD Conflat type)