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McMillan - Model U702 -UHP Liquid Flo-Sensor
McMillan Model U702 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U702 features a U-shaped space-saving flow path and an analog output.
ACCURACY/LINEARITY
Analog output models have an accuracy specification of ±1.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated FEP-jacketed cable terminated with pigtail leads.
FLOW PATH
U702 FLO-SENSORS feature a U-shaped flow path, which allows all fluid connections on one side of the unit to effectively reduce footprint.
FLOW RANGES
Flow ranges from 15-100 mLpm up to 5-50 Lpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek-compatible connections as standard. Nippon Pillar Super 300 or other non-standard connection types may be available upon request.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available.
SIGNAL OUTPUTS
Model U702 can be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC output.
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.