ProFlow USA

ProFlowModel 41500 -Micro Mass Flow Meters for Precision Fluid and Gas Measurement

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Micro mass flow meters are specialized instruments used to measure extremely low flow rates of fluids or gases, typically in the range of microliters per minute or less. These devices are crucial in applications requiring precise control of small fluid volumes, such as in research settings and the development of microfluidic devices. Various sensing technologies, including thermal, pressure-based, and Coriolis-based sensors, are employed to achieve accurate measurements. They are compact and designed to minimize flow disturbances, making them ideal for the pharmaceutical, biotech, and semiconductor industries. These devices, known for their sensitivity and precision, often require careful calibration and maintenance. They are typically integrated into comprehensive microfluidic systems alongside micro pumps and micro valves. Leveraging microelectromechanical system (MEMS) flow sensor technology and computer adaptive technology, these meters offer high sensitivity, precision, and a broad measurement range. They are equipped with electromagnetic compatibility designs and multiple signal outputs, enabling network functionalities. Widely used in industries such as petroleum, gas, chemical, and energy, these meters excel in performance, installation, and maintenance.

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Micro mass flow meters are specialized flow meters used to measure very low flow rates of fluids or gases, typically on the order of microliters per minute or less. They are often used in research applications and in the development of microfluidic devices, where precise and accurate control of small volumes of fluids is critical.

 

Micro mass flow meters use a variety of sensing technologies, including thermal, pressure-based, and Coriolis-based sensors. They are typically designed to be small and compact, with low dead volumes and minimal flow disturbances, in order to accurately measure low flow rates.

 

One common application of micro mass flow meters is in the pharmaceutical and biotech industries, where they are used to accurately dispense and control small volumes of fluids for research and drug development purposes. They are also used in the semiconductor industry for precise gas flow control in the manufacturing of microelectronic devices.

 

Micro mass flow meters are highly sensitive and precise, but they can also be expensive and require careful calibration and maintenance. They are often used in conjunction with other microfluidic devices, such as micro pumps and micro valves, to create complete microfluidic systems for research and development purposes.

 

Micro Mass Flow Meters combines microelectromechanical system (MEMS) flow sensor chip technology and computer adaptive technology, to develop the intelligent all electronic gas mass flow meter, the main technical performance is at the international leading level, with high sensitivity, high precision and large range of measurement characteristics:

 

In view of the industrial environment, electromagnetic compatibility design incorporates a variety of anti-jamming measures.  With a variety of signal output, can through the communication interface to realize network management functions.

 

This Micro Mass Flow Meters also has its unique superiority in performance, installation and maintenance, which can be widely used in petroleum, gas, chemical, smelting, energy and other fields.

  • Size  ; 1/4", 3/8", 1/2", 3/4"
  • Media Type  ; Gas, Liquid
  • Pressure Class  ; < 150LB, <300LB, <600LB, <1500LB, <3000LB
  • Connections  ; Compression, Swage
  • Voltage  ; 24VDC, Battery
  • Output  ; 4-20MA, Pulse, 0-10 VDC
  • Communication  ; RS232, HART
  • QC Certificate  ; No, Yes

Thermal Mass Gas Flow Meter with Valve Option
Suitable for a variety of Dry, Clean Gases (User Configurable)

DN6, 0 – 20 SLPM (42.38 SCFH, 1.20 NCMH)
Hi/Low Alarm configuration (Visual & Audible alert)
1/4″ BSP (or NPT)

Thermal Mass Flow Measurement,

RS485 Modbus RTU output option
Integrated Valve option
4x AA Batteries or USB Type-C Powered

Features

  • Accuracy ±(2.0+0.5FS) %
  • Repeatability 0.5 %
  • Turn-down ratio 80:1
  • Response time ​
  • Working temperature -10~55 °C
  • Maximum pressure 0.8 MPa (8 Bar)
  • Humidity <95%RH noncondensing
  • Maximum overflow MF5706=100 MF5708=200 MF5712=400 L/min
  • Maximum flow change MF5706=15 MF5708=30 MF5712=60 L/min
  • Pressure loss MF5706=0.6 MF5708=1.0 MF5712=2.0 kPa
  • Power supply 4-AA batteries (LR6) / 5~24 Vdc
  • Power consumption >60 (on batteries) day
  • Power / data interface USB Type-C
  • Digital RS485 Modbus half-duplex
  • Wireless options LoRa / WIFI / NB-IoT / BT LE Display
  • LCD Resolution 0.01 L/min (instant) / 1 L (accumulated)
  • Mechanical connection MF5706=BSPP 1/4 BSPP MF5708=3/8” MF5712=BSPP 1/2”
    or MF5706=NPT 1/4” or MF5708=NPT3/8” or MF5712=NPT/ 1/2”
  • Storage temperature -20 ~ 70 °C
  • Calibration Reference conditions 20°C, 101.325 kPa, air
  • Ingress Protection IP50
  • Gas compatibility Non-corrosive
  • CE EN61326-1; -2; -3