MKS Inc.
MKS - Model T2BA -Exhaust Throttle Valve with Integrated Controller
FromMKS Inc.
T2BA EtherCAT, RS232, RS485, DeviceNet®, Analog/TTL Exhaust Throttle Valves with Integrated Controller are specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement.
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- On-board LCD touchscreen display of pressure and position
- Programmable for pressure or position control
- Encoder-based actual position verification
- Heatable valve body (105°C standard, 150°C and 200°C optional)
The T2BA supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) and is suitable for "house exhaust" or atmospheric applications.
