MKS Inc. products

The AA07B12PBB2GT1 Micro-Baratron® High Pressure, Ultraclean, Single-end Pressure Transducer offers a Full Scale measurement range of 100 psia with a 0.25 inch OD tube fitting, 0-10 VDC analog output, and LDM-C (Red LED), 0-5 VDC and 0-10 VDC with high density D connector in a standard enclosure. It is ideally suited for use in delivery systems that feed ultrapure gases to critical process systems. Their wetted surfaces exposed to the gas stream have a finish of better than 5 µin Ra. These transducers exhibit superior dry-down characteristics, and contribute no particles above background. After manufacture and assembly, they are purged with ultraclean nitrogen prior to double bagging in a class 100 environment. The all-Incoloy® construction of the sensors in the AA07B allows for high overpressure tolerances that reduce errors due to line pressure spikes.

The GE50A013103SBV020 elastomer-sealed Mass Flow Controller features 1000 sccm, with 0.25 in. Swagelok-style fitting, a DB15 connector, with a Viton seal.

The MultiGas™ 2030 CEM is an FTIR-based gas analyzer designed for continuous monitoring of emissions in effluent streams containing up to 40% of water. Permanently stored calibration spectra reduces the need for costly reference gas mixtures. The MultiGas™ 2030 analyzer contains a 2102 Process FTIR Spectrometer, a patented, high-optical-throughput sampling cell, applications-specific analysis software, and an instrument-independent, quantitative spectral library. It incorporates a novel long wavelength thermoelectrically (TE) cooled detector for more accurate, highly sensitive measurement of most gases and vapors in high moisture streams (up to 40%), producing high resolution spectra (0.5cm-1), enabling detection and measurement of components such as SO2, NO2 and NO, without removing the moisture.

T2BA EtherCAT, RS232, RS485, DeviceNet®, Analog/TTL Exhaust Throttle Valves with Integrated Controller are specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement.

The AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, ultra high concentration, high flow ozone is produced by this generator’s novel architecture and patented cell design, converting oxygen to > 400 g/Nm³  of high concentration ozone for leading-edge applications in the semiconductor, flat panel display, and photovoltaic industries. The technology designed into the AX8415 is the basis of this generator’s versatility. Product Features Ozone is used in the formation of CVD and ALD thin films, oxide growth, photoresist removal, and multiple cleaning applications. The AX8415 has the capability to support all these applications by producing the highest concentrations of ultra clean ozone with or without the addition of nitrogen as a dopant gas. Removing the minute amount of nitrogen used in the formation of ozone eliminates the formation of NOx compounds, if required for a given application. 

The MGS300 system is a fully turn-key system designed to provide reliable monitoring of emissions from stationary sources, including municipal and industrial waste incinerators, power plants, cement kilns and other fixed location sources of emissions.

Precisive 5 gas analyzers require no carrier-gases, no-calibration gases and offer fast response analytics without compromising accuracy, repeatability, linearity or stability in the presence of interference. Precisive 5`s faster-response multi-component analysis provides significant cost-savings and efficiency gains in power generation applications.