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Model 3F Series / 1000 Series RGA -Residual Gas analysis System

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A residual gas analysis system for high precision scientific and process applications. The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.

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The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.

The triple filter quadrupole minimises contamination from unwanted ions, where the pre and post RF only filters work at different selected frequency from that of the main mass filter. In combination with the longer mass filter and wider rod diameter of 9 mm, this results in increased mass resolution, ion sensitivity, stability for precision/ratio measurements and high mass transmission.

  • Mass range 50, 300, 510, 1000 amu, 6mm and 9 mm molybdenum pole designs
  • Increased mass resolution, high mass transmission, and ion stability
  • Full electron energy control 0-150 eV for complementary TIMS analysis mode
  • Available with SEM or PIC detection or optional dual Faraday/SEM or Faraday/PIC models