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Model CS-200 -Load-Lock-Type Sputtering System
FromULVAC GmbH
Load-lock type Sputtering System CS 200 is for research & development and small production application.
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- vacuum load lock sputtering system with tray handling ø320mm
- four cathodes each ø100mm with shutter
- co-sputtering, DC, puls-DC, RF
- adjustable distance T/S from 60 to 180mm
- roughness of ≤0.5nm after annealing @2000°C for sputtered carbon cap @RT
- footprint 0.9m x 2.3m
- Especially designed for small production and R&D purpose