ULVAC GmbH products

Compact footprint. Capability to deposit cosmetic films over EMI shield. Low temperature process.

Load-lock type Sputtering System CS 200 is for research & development and small production application.

This is a batch type high vacuum evaporation system for the deposition of metal and oxide on a substrate. Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.

CV-200 consists of two chambers; a load-lock chamber and an evaporation chamber. Employing the load-lock type system enables the process to be carried out in a constantly clean environment. It also provides superior film repeatability. Application ranges from R&D use to small production.

EW -Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.

Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard (CE,cTUVus). Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and cylinder.

A pressure sensor unit that is adopting a semiconductor type thin- film element. By this can measure near to the atmosphericpressure (Gaugepressure: -100kPa~10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.