Nanoscope Systems, Inc
Model NS-3500 -High-Speed Confocal Laser Scanning Microscope (CLSM)
NS-3500 is a high-speed confocal laser scanning microscope (CLSM) for precise and reliable 3-dimensional measurement.A real time confocal microscopic image is achieved by fast optical scanning modules and signal processing algorithms. It is a promising solution to measure and inspect the microscopic 3D structures such as semiconductor wafers, FPD products, MEMS devices, glass substrates, and material surfaces.
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- High resolution nondestructive optical 3D measurement
- Real time contocal imaging
- Various optical zoom
- Simultaneous bright field and contocal imaging
- Automatic gain search with fine auto focus
- Inclination compensation
- Easy analysis mode
- Precise and reliable high-speed height measurement
- Inspection of features through semi-transparent substrate
- No sample preparation
- Dual Z-scanning mode
