Nanoscope Systems, Inc

Model NS-3500 -High-Speed Confocal Laser Scanning Microscope (CLSM)

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NS-3500 is a high-speed confocal laser scanning microscope (CLSM) for precise and reliable 3-dimensional measurement.A real time confocal microscopic image is achieved by fast optical scanning modules and signal processing algorithms. It is a promising solution to measure and inspect the microscopic 3D structures such as semiconductor wafers, FPD products, MEMS devices, glass substrates, and material surfaces.

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  • High resolution nondestructive optical 3D measurement
  • Real time contocal imaging
  • Various optical zoom
  • Simultaneous bright field and contocal imaging
  • Automatic gain search with fine auto focus
  • Inclination compensation
  • Easy analysis mode
  • Precise and reliable high-speed height measurement
  • Inspection of features through semi-transparent substrate
  • No sample preparation
  • Dual Z-scanning mode