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Model SiNA -Industrial Coating Systems
With its SiNA® systems, Meyer Burger`s competence centre for coating technologies, Roth & Rau AG, provides SiN coating systems for a host of capacity requirements from pilot production to fully automated mass production.
The systems use an in-line process in which the silicon wafers are transported on flat carriers through the system. The carriers can be configured flexibly in terms of wafer formats and materials, and provide simple automation options for loading and unloading.
The layers are deposited in a continuous process in a silane/ammonia plasma using patented plasma sources developed specially for this process. As a result of thorough process optimization and extensive experience in production conditions, the SiN layers display outstanding passivation properties and excellent homogeneity of layer thickness and optical parameters.
In recent years, enhancements have mainly focused on economic aspects as well as technological improvements in the coating process. The current generation of SiNA machines boasts far lower operating costs than previous models and competing products, and take up far less space as a result of their totally revamped design.
- Lower operating costs than competing products
- Ideally adapted to throughput requirements (50 MWp to 125 MWp)
- No restrictions in terms of wafer materials or formats - also suitable for thin wafers
- Ergonomic, maintenance-friendly design
- Made up of standardized base modules, enabling fast implementation of new technologies