Meyer Burger products

The BrickMaster BM 860 belongs to the newest generation of bricking solution. It can handle G6 (1000 x 1000 mm) as well as 6” and 8” mono c-Si formats. The maximum work piece height amounts to 550 mm. The use of diamond wire doubles the output compared to slurry-based bricking. The G6 format increases the output by an additional 40% (multi c-Si).

The IonSys 800 system is designed for industrial ion beam etching and deposition processes with maximum quality and productivity requirements. The combination of multi-layer etching and deposition in one tool is possible. The reliability, uptime and compatibility with clean room class 100 compliance with all the requirements for advanced production equipment in microelectronics and optics. The advanced IonSys 800 can also be configured as a cluster system and is equipped with an automatic handling robot that features a cassette load-lock.

The MicroSys system is designed as a cost effective and high-quality solution for various applications in research and for small scale production. The system control and vacuum components are incorporated in a single cabinet. It can be adapted to RIE, PVD and PECVD and can process different substrate sizes up to 200 mm / 300 mm in diameter. The modular concept of MicroSys 200 / MicroSys 300 allows a customized setup of plasma sources and sample heating or cooling.

The GlueMaster is an independent gluing station available in five configuration levels/expansion stages. The GlueMaster 1 offers an adjustable mixing and dosing unit to apply the glue onto the workpiece holder, glass beam and bricks. Compared to manual glueing, this process saves in average 50 per cent of the glue.

The CR150/450 is a highly efficient, single-yoke cropping saw. The flexible cutting system is an ideal choice for a wide variety of cutting applications such as: silicon, sapphire, silicon carbide, quartz, fused silicon glass, ceramics, graphite, germanium, and more. The flexible cutting system allows you to choose from a single crop, or an optional three-motor cutting system allowing the saw to produce 2 wafer samples with each crop cut.

With its SiNA^® systems, Meyer Burger`s competence centre for coating technologies, Roth & Rau AG, provides SiN coating systems for a host of capacity requirements from pilot production to fully automated mass production.