NANOCHEM - BLOC Series Purifiers
From NanoCHEM - Gas Purification Systems
The NANOCHEM BLOC Purifier in combination with DOC filter is a compact purifier/filter designed for ultra-high purity applications in the semiconductor industry. NANOCHEM purification media react with impurities to deliver consistently pure gas to the process tool improving yields. BLOC Purifiers can be installed as point-of-use filters at the process tool. They can also be installed in cylinder cabinets. Available in 50, 100 and 200 ml field interchangeable and replaceable purification canisters. Base foot-print of only 2.11 inches (53.6 mm) with tube connections and 3.31 inches (84 mm) with VCRe-compatible face seal fittings. All metal parts, Type 316L VlfvWAR stainless steel or Nickel 200. Downstream particle cleanliness: Less than 1 particle/ft3 greater than 0.014 urn. No moving parts or power requirements. All metal Z-Seal between body pieces.
Features and Benefits
- Purification for all applications from source to point-of-use
- Highest Lifetimes
- Best Impurity Removal Efficiencies
- Removes critical contaminants to sub parts-per-billion levels (< 0.1 ppb in inert gases)
- Patented built-in poppet valves at purifier inlet and outlet
- Reduces/eliminates exposure of media bed to atmospheric air during purifier installation
- Reduces operator exposure to process gas during purifier removal
- Enhances manufacturing process economy and improves equipment performance
- Provides consistently high purity gas regardless of inlet impurity fluctuations (up to 1000 ppm)
- Improves component lifetime and reduces particulate generation by removing moisture & volatile metals from corrosive gases.
- Versatile and upgradeable design
- 3 different interchangeable sizes for different flow and lifetime requirements
- No moving parts or power requirements
- Low Overall Cost of Ownership
- Factory-installed BLOC-DOC combinations available
Specifications
- Recommended flow rates up to 20 slpm (1.2 NMVhr)
- 0.003 urn particle filter with 99.9999999% retention
- Internal surface finish < 15 pin Ra
- Maximum allowable working pressure of 150 psig (1.14 MPa)
- Maximum operating temperature of 40°C
Connections
- Mounted on DOC with
- Male inlet and outlet connections 'A inch, VCR-compatible face seal fittings with protective cap
- 1/4 inch tube stub connections for welded applications
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