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nanoCVD - Model 8G -Benchtop Graphene CVD System
A benchtop graphene CVD system for rapid, on-demand synthesis of high-quality graphene. Fully automated cold-wall technology for reduced contamination and running costs, and enhanced conditions control.
The units implement the cold-wall variant of the CVD method, enabling reduced contamination, low running costs and better control as compared to tube-furnace counterparts.
User operation is via a touchscreen HMI and is recipe-based, with all hardware being fully automated. Comprehensive safety features protect users and the system itself. Included PC software enables data-logging and offline recipe definition. All units come with expert support.
Systems are quick to install and ideal for research groups requiring ongoing rapid access to high-quality graphene for R&D applications.
The nanoCVD-8G is available with a rotary or scroll (dry) backing pump.
The nanoCVD-8G requires inert service gas, high-purity process gases (argon, hydrogen and methane) and electrical power.
- Benchtop configuration
- Water-cooled magnetron sputtering sources for industry-standard 2″ targets
- MFC-controlled process gases
- DC and/or RF power supplies
- Fully automatic operation via touchscreen HMI
- Define/save multiple process recipes
- Up to 4” diameter substrates
- Base pressures
- Equipped for easy servicing
- Comprehensive safety features
- Cleanroom compatible
- Proven performance