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PIModel P-750 -Piezo Nanopositioner

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1 nm lateral guiding accuracy; Frictionless, high-precision flexure guiding system; Load capacity to 10 kg; Resolution; Direct metrology with capacitive sensors for highest precision; Direct drive for Fast response; Travel range 75 µm; Outstanding lifetime due to PICMA® piezo actuators.
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Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

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MotionP-750.20Tolerance
Active axes X  
Travel range in X 75 µm  
Travel range in X, open loop, at -20 to 120 V 75 µm +20 / -0 %
Roll (Rotational crosstalk in θX with motion in X) ± 10 µrad typ.
Pitch (Rotational crosstalk in θY with motion in X) ± 10 µrad typ.
Positioning P-750.20 Tolerance
Resolution in X, open loop 0.4 nm typ.
Integrated sensor Capacitive, direct position measuring  
System resolution in X 1 nm  
Drive Properties P-750.20 Tolerance
Drive type PICMA®  
Electrical capacitance in X 7.7 µF ±20 %
Mechanical Properties P-750.20 Tolerance
Resonant frequency in X, unloaded 600 Hz ±20 %
Permissible push force in Z 100 N max.
Guide Flexure guide with lever amplification  
Overall mass 2.55 kg  
Miscellaneous P-750.20 Tolerance
Connector LEMO FFS.00.250.CTCE24  
Sensor connector LEMO FFA.00.250.CTLC31  
Cable length 1 m  
Recommended controllers / drivers

E-500 • E-501, E-610, E-621, E-625, E-665, E-709, E-754

 

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.