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- PI - Model P-750 - Piezo Nanopositioner
PI - Model P-750 -Piezo Nanopositioner
Outstanding lifetime due to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.
| Active axes | X | |
| Travel range in X | 75 µm | |
| Travel range in X, open loop, at -20 to 120 V | 75 µm | +20 / -0 % |
| Roll (Rotational crosstalk in θX with motion in X) | ± 10 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 10 µrad | typ. |
| Positioning | P-750.20 | Tolerance |
| Resolution in X, open loop | 0.4 nm | typ. |
| Integrated sensor | Capacitive, direct position measuring | |
| System resolution in X | 1 nm | |
| Drive Properties | P-750.20 | Tolerance |
| Drive type | PICMA® | |
| Electrical capacitance in X | 7.7 µF | ±20 % |
| Mechanical Properties | P-750.20 | Tolerance |
| Resonant frequency in X, unloaded | 600 Hz | ±20 % |
| Permissible push force in Z | 100 N | max. |
| Guide | Flexure guide with lever amplification | |
| Overall mass | 2.55 kg | |
| Miscellaneous | P-750.20 | Tolerance |
| Connector | LEMO FFS.00.250.CTCE24 | |
| Sensor connector | LEMO FFA.00.250.CTLC31 | |
| Cable length | 1 m | |
| Recommended controllers / drivers |
E-500 • E-501, E-610, E-621, E-625, E-665, E-709, E-754 |
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
