PMS AirSentry II - Multi-point Monitoring System

Ensure your operators and processes are safe with high sensitivity particle monitoring. AirSentry® II provides fast response and repeatable performance.

Monitors a Range of Contaminants
AirSentry® II detects and alerts users to small concentrations and changes in airborne levels of chlorides, acids, amines, and ammonia-containing species.

70 Parts Per Trillion
Resolve process issues or leaks before they impact product quality with early detection. These sensors have a sensitivity of 70 parts per trillion, so you discover changes quickly and react fast.

In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic AMC monitoring program.

• Low cost-per-sample point
• Detects multiple airborne molecular contamination (AMC) compounds, as specified by the user
• Programmed monitoring to detect AMC events and trends
• Compact size
• Versatile configuration of testing locations

• Monitors up to 30 sample locations for airborne molecular contamination (AMC)
• Features AirSentry II ion mobility spectrometry (IMS) sensors—sensitive, reliable, repeatable
• Detection of low concentrations of acids, amines, ammonia and chlorides
• Calibrations traceable to the National Institute of Standards and Technology (NIST)
• Real-time graphical software
• Industrial PC for robust and reliable operation in production environments
• Slide-out keyboard and display for convenient interface

• Multi-point cleanroom and process bay monitoring for airborne molecular contamination
• Baseline and qualification of AMC levels in new cleanrooms
• Analysis and quantification of chemical filter efficiency
• Characterization of AMC contribution from makeup and recirculation air

• Sample point options: 16 or 30 Channels
• Analyzer options: NH3, Amines, Acids, Chlorides
• Analyzer ranges: 0 - 50 ppbv
• Sample tube length (max.): 75 m
• Power: 120 VAC or 230 VAC
• CDA requirements: 10 LPM, 40 psig input, < -76 °F (< -60 °C) dew point, no particles > 50 µm, hydrocarbon-free
• Vacuum: < 33 kPa (absolute)
• Weight: Depends on analyzer configuration
• Dimensions (H x W x L): 46 x 23 x 30 in (117 x 58 x 76 cm)
• Communication Ethernet: (OPC)

Strategies for AMC contamination monitoring fall into three general categories:

1. Real-Time:
Real-time monitors are used continuously in the most critical locations, such as photolithography, where even sub-ppb levels of contamination degrade process performance and negatively impact yield.

2. Near Real-Time:
 Near real-time monitors consist of a multi-port sampling scheme to sample a large number of locations on a  periodic basis (2 – 3 times per day).

3. O-Line:
O-line monitoring generally is the process of manually collecting an air sample over a 6 – 24 hour period; laboratory analysis is performed at some later date, with results returned in 7 – 10 business days.

A robust AMC monitoring process uses a combination of all three strategies with a near real-time technique providing the majority of information. The data from the near real-time analyzer oen triggers the subsequent use of either real-time or o-line techniques in order to provide more detailed time-based or composition-based information. This allows for minimum monitoring costs as real-time and o-line techniques are more expensive on a per sample point basis over the lifetime of the monitoring period. In summary, near real-time monitoring through the use of the AirSentry II AMC Monitoring System is the foundation upon which robust and capable AMC monitoring programs and strategies are built.