PMS UltraChem - Model 100 & SLS-1100 -Syringe Liquid Sampler With Particle Counter

• Precise particle measurement
• Versatile - select various particle sensors and syringe sizes
• Cost-effective
• Easy-to-use
• Small sample volume - eliminates sample waste

• Proven PMS UltraChem particle sensors
• Menu-driven data collection - 1, 5, 10 and 25 ml
• Wetted materials compatible with corrosive chemicals
• Compact design with on-board particle sensor

• Diverse applications in semiconductor and process chemical manufacturing
• Incoming quality measurement of process chemicals
• Point-of-process monitoring on process tools
• Testing and qualification of chemical components
• Outgoing chemical qualification testing
• Mechanical parts cleanliness testing

• SLS-1100
• Syringe size: 25 ml
• Sampling mode: Vacuum, Batch
• Minimum sample size: 0.4 ml @ 20 ml/min
• Wetted surface materials: Glass, Teflon (all fluoropolymer materials optional)
• Power: 100 - 240 V, 50 - 60 Hz
• Sample volume: Adjustable using soware interface
• External Dimensions (l, w, h): 15 x 9 x 17.1 in (38.1 x 22.0 x 43.4 cm)
• Weight: 42 lb (19.1 kg)
• Environment
• Temperature: 50 – 86 °F (10 – 30 °C)
• Humidity: Non-Condensing
• Indoor use only
• Pollution degree 2
• Over-voltages (transients) Category II
• Ordinary protection (not protected against harmful ingress of moisture)
• Class I equipment (Electrical earth ground from the mains power source to the product input is required for safety purposes)

* Greater than 90% accuracy (less than 10% coincidence loss) at max. recommended concentrations.
** Compatible with hydrofluoric acid sampling.

• SLS instrument label: SLS-1100
• Size range: 100 - 500 nm
• Channels: 100, 200, 300, 500 nm
• Flow rate: 20 ml/min
• Sampled%:
• 30% Monitor mode
• 16% Spectrometer mode
• 13% High-Scatter mode
• Maximum concentration*
• 3,000 particles/ml, Monitor mode
• 9,000 particles/ml, Spectrometer mode
• 15,000 particles/ml, High-Scatter mode
• Zero count: < 50 counts/l
• Maximum pressure: Ambient pressure
• Laser source
• Laser diode
• Class I, complies with US 21 CFR 1040.10 and EN 60825-1.
• Internally an enclosed Class 4 laser is used per EN 60825-1.
• Sample temperature: 50 - 122 °F (10 - 50 °C)
• Wetted surface materials: Sapphire**, Teflon, Kel-F®
• Calibration: Materials used are traceable to National Institute of Standards & Technology (NIST) and/or Japanese Industrial Standards (JIS).
• Soware: SamplerSight

Kel-F® is a registered trademark of 3M.
All other trademarks are the property of their respective owners.
Particle Measuring Systems, Inc. reserves the right to change specifications without notice.