Physical Electronics, Inc. (PHI)
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QuantesModel XPS/HAXPES -Scanning Microprobe

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The PHI Quantes is the only commercially available automated, high-throughput lab-based HAXPES spectrometer. It is a unique scanning X-ray photoelectron microprobe that combines a high energy (HAXPES) monochromatic X-ray source (Chromium Kα) with a conventional monochromatic soft X-ray source (Aluminum Kα). Both sources are high flux focused X-ray beams that can be scanned across the sample surface and can be used to define analysis points, areas, lines, and maps with 100% confidence. The analytical information depth using the Cr X-ray source is about 3 times deeper than with the Al X-ray source. This opens opportunities for probing thicker film structures and buried interfaces, as well as minimizing the effects of surface contamination and ion-induced chemical damage during depth profiling. Bring HAXPES synchrotron capabilities into your lab with the PHI Quantes!
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The Only Fully Automated High-Throughput Lab-Based XPS/HAXPES Instrument On The Market Commercially Available
  • Large sample handling
  • Multiple parking positions
  • Automated sample transfer and handling
  • Fast automated switching between XPS and HAXPES modes
Intuitive Sample Navigation And Confident Analysis Area Identification
  • The unique scanning X-ray microprobe allows SEM like navigation with point-and-click control
  • X-ray induced secondary electron imaging (SXI) provides perfect correlation between imaged areas and spectroscopy
Superior Micro-Area Analysis
  • Highest small area sensitivity on the market
  • <10 microns microprobe size in x and y for Al X-ray source and <14 microns for Cr X-ray source
  • Image registration for unattended automated micro-area analysis
Optimized Depth Profiling
  • Multiple ion gun options (monatomic Ar, dual Ar and cluster GCIB) for a variety of organic and inorganic
  • Full 5-axis stage functionality including rotation/tilt and heating/cooling during sputtering
  • Multipoint profiling within a single sputter crater for on/off defect analysis and precious samples
  • Adjustable solid collection angle for improved angular resolution for Angle Resolved analysis with advanced software for high-throughput film structure analysis
Suite Of Specialized Solutions For Advanced Surface Analysis Needs
  • Heating and Cooling in situ
  • Electrochemical (biasing, polarization studies) experiments
  • Glove Box Adapter
The Only HAXPES Instrument With Experimental RSFs For Common Elements