Servomex - a Spectris Company

- Model DF-560E - DF High Purity Gas Analyzers



Ultra-trace coulometric Oxygen measurements in ultra-high purity electronic grade gas for quality control. Designed to measure ultra-trace oxygen to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt Lower Detection Limit (LDL). Flexible and adaptable, the DF-560E is able to monitor O2 in multiple background gases while logging data in a variety of formats.

This device negates the effects of upset prone applications, thanks to Servomex’s high stability Coulometric sensing technology delivering a fast speed of response in the presence of sample and flow rate changes.

Ideal for semiconductor fabs and analytical carts, the DF-560E is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while various hand carry options make it easy to transport. The DF-560E also reduces operational costs through non- depleting, factory calibrated Coulometric technology, providing cost-effective setup and configuration. The only ongoing maintenance requirement is an annual SPAN calibration, with no programmable cell replacement needed.

  • Broad detection range: 0-1ppb - 0-20ppm
  • Monitors multiple background gases with a single unit
  • Sensor compensates for sample and flow rate fluctuations - ideal for upset prone applications
  • Operable via front panel or digital communication options
Easy to use
  • Flexible portability
  • Optional calibration system for compact integration onto the rear of the panel, optimizing device portability
  • Simplified ongoing maintenance requirements
  • Comprehensive automated datalogging with 4 day and 30 day graphical reading records
Low cost of ownership
  • Factory calibrated sensors for simplified set-up
  • Non-depleting Coulometric sensor with five year warranty
  • Requires only an annual SPAN calibration
  • Expensive purifier replacements not required
Unrivalled performance
  • Industry-leading 45ppt Lower Detection Limit (LDL)
  • Uses industry-leading Coulometric E-sensor technology
  • Fast speed of response
  • Manufactured by Servomex - over 60 years’ experience with thousands of units used in the field
Benchmark compliance
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive 

  • 309mm (12.1”) Wide x 203 (7.9”) High x 253mm (9.9”) Deep
  • 8.2kg (18lbs)
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

  • Quality control checks for electronics grade gases
  • Leak detection for electronics grade gases

Ensure your DF-560E ultra-trace oxygen analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

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