Servomex - a Spectris Company

- Model DF-730 - DF High Purity Gas Analyzers



Tunable Diode Laser (TDL) trace moisture measurements, suitable for monitoring electronic grade HCI gas production in semiconductor fabs. Designed to analyze moisture contamination in electronics grade HCl used in semiconductor fabs, the DF-730's highly sensitive performance is ideal for quality control and leak detection applications. Servomex's industry-leading TDL sensing technology and a robust Herriot Cell enables a broad measurement range of 1ppb-10ppm. By ensuring moisture only comes into contact with minimal optical components, the DF-730's performance is unaffected by loss in mirror reflectivity - ensuring a fast response measurement that is stable, accurate and consistent.

This device is also optimized to deliver attractive affordability over product life. The use of leading-edge TDL sensing technology provides zero drift, helping to extend maintenance periods and reduce calibration needs; these aspects combine to make the DF-730 an ideal solution for semiconductor fabs, with its high performance, ultra-stable monitoring capability and considerable operational cost-savings.

  • Tunable Diode Laser (TDL) sensing provides high stability and minimal moisture contact with optical elements 
  • Broad detection range: 1ppb – 10ppm 
  • Operable via front panel or digital communication options 
Easy to use
  • Simplified ongoing maintenance requirements with no consumables required 
  • High reliability; repeatable baseline measurements unaffected by loss in mirror reflectivity 
Low cost of ownership
  • Maintenance periods extended by the use of ultra-stable TDL sensing technology 
  • Zero drift reduces calibration requirements 
Unrivalled performance
  • Analysis immune from gas cell concentration: DF-730 operates to specification with up to 90% signal loss
  • 1ppb Lower Detection Limit (LDL)
  • Manufactured by Servomex - over 60 years’ experience with thousands of units used in the field
Benchmark compliance
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

  • 465mm (12.1') Wide x 190 (7.9') High x 253mm (9.9') Deep
  • <31.8kg (70lbs)
  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

  • Quality control of HCl gas in semiconductor fabs

Ensure your DF-730 NanoTrace analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

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