Servomex - a Spectris Company

- Model DF-750 - DF High Purity Gas Analyzer

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Tunable Laser Diode (TDL) trace-ultra moisture measurements for quality control in semiconductor fabs. Designed specifically to make trace and ultra-trace measurements in a range of ultra high purity gases, the DF-750 is the leading choice in moisture analysis for the semiconductor industry. Optimized for use in 300mm semiconductor fabs, the DF-750 measures moisture as a contaminant in electronics grade nitrogen, hydrogen, helium, argon and oxygen.

With Servomex’s industry-leading TDL sensing technology delivering an industry-leading 100ppt Lower Detection Limit (LDL), the DF-750 delivers a stable, highly accurate measurement that meets the precise monitoring needs of semiconductor production.

This analyzer also offers attractive affordability over product life. The DF-750’s robust sensor construction has low lifetime maintenance requirements and delivers zero-drift stability that greatly extends calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 is the first-choice analytical solution for UHP gas quality checks.

Flexible
  • Trace level Tuneable Diode Laser (TDL) sensing provides high stability and minimal moisture contact with optical elements
  • Broad detection range: 0-20ppm
  • Storage and recall function: calibration, system error and measurement data facilitates archiving operational history
  • Operable via front panel or digital communication options
Easy to use
  • Simplified ongoing maintenance requirements through the use of non-depleting, low drift potential TDL sensing technology
  • High reliability; repeatable baseline measurements are not affected by a loss in mirror reflectivity
Low cost of ownership
  • Robust sensor construction reduces maintenance requirements
  • Zero drift extends calibration intervals
Unrivalled performance
  • Uses industry-leading, non-depleting, high stability TDL trace sensing with zero drift
  • Industry leading 100ppt Lower Detection Limit
  • Manufactured by Servomex - over 60 years’ experience pioneering gas analysis with thousands of units used in the field
Benchmark compliance
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

Size
  • 483mm (19”) Wide x 266mm(10.5”) High x 608mm (23.9”) Deep
Weight
  • <31.8kg (70lbs)
Certifications
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

  • Bulk gas quality control checks for UHP electronic gases used in 300mm semiconductor fabs
  • Leak detection checks for UHP electronic gases used in 300mm semiconductor fabs

Ensure your DF-750 NanoTrace moisture analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

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