Servomex - a Spectris Company

- Model DF-760E - DF High Purity Gas Analyzer



Unique dual measurement trace/ultra-trace moisture/oxygen analyzer for quality control of UHP bulk gases. A unique analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is a compact integrated solution for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.

Combining the industry-leading properties of Servomex’s non-depleting Coulometric E-Sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low levels contaminant levels of H2 and O2 within background gas blends of N2, H2, He, O2 and Ar (H2O in O2 only).

In offering an exceptionally low, industry-leading Lower Detection Limit (LDL) of 100ppt (H2O) / 45ppt (O2), the DF-760E offers the fast speed of response, unsurpassed stability and immunity from trace acid damage which makes it ideal for quality checking and leak detection in semiconductor FAB applications.

This exceptional measurement performance is supported by a low-maintenance design, delivered through the resilient zero-drift sensing technologies which require no ongoing calibration.

  • Unique industry solution for ppt monitoring of moisture and O2
  • Operable via front panel or digital communication options
  • Broad Detection Range: 0-20ppm – 0-2ppb min (H20) / 0-20ppm – 0-1ppb min. (O2)
Easy to use
  • Dual analysis capability provides ‘one-box’ solution to H2O/O2 trace contaminant measurements
  • A single analyzer can be used for multiple background gases: N2, H2, He, Ar and O2
Low cost of ownership
  • Resilient TDL and non-depleting Coulometric sensing requires minimal ongoing maintenance
  • Zero sensor drift greatly extends calibration intervals
  • Coulometric E-Sensor immune from acid damage
Unrivalled performance
  • Stable, accurate sensing delivers industry-leading trace measurements
  • 100ppt LDL (H2O) / 45ppt LDL (O2)
  • Manufactured by Servomex - over 60 years’ experience pioneering gas analysis thousands of units used in the field
Benchmark compliance
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

  • 483mm (19”) Wide x 266mm
  • (10.5”) High x 608mm (23.9”) Deep 
  • 31.8kg (70lbs)
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

  • Bulk gas quality control checks for integrated circuit board fabs
  • Leak detection checks

Ensure your DF-760E dual oxygen and moisture analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

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