Filmetrics - Model R50 Series -Sheet Resistance Measurement

Filmetrics R-Series sheet resistance mapping tools marry the technology developed and perfected by KLA for over 45 years with the benchtop instrument technology developed over the last 20 years by the Filmetrics team. The R50-4PP contact four-point probe is recommended for thin metal and ion implant layers, and the R50-EC non-contact eddy current probe is recommended for thicker metal layers and soft or flexible surfaces, including: Semiconductor wafer substrates, Glass substrates, Plastic (flexible) substrates, PCB patterned features, Solar Cells, Flat panel display layers and patterned features, Metal foils