Voltaix LLC
Silane Used for CVD of Epitaxial Silicon
FromVoltaix LLC
A pyrophoric, colorless gas. Silane is used for CVD of epitaxial silicon and silicon alloys and PECVD of amorphous silicon and silicon based dielectrics.
A pyrophoric, colorless gas. Silane is used for CVD of epitaxial silicon and silicon alloys and PECVD of amorphous silicon and silicon based dielectrics.