Voltaix LLC products

A pyrophoric, colorless, assumed to be toxic gas, used as a stable boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition.  Trimethylboron is usually shipped as a pure liquefied gas, or in mixtures with argon, helium, hydrogen, nitrogen or silane.  Also available enriched in B-10 or B-11 as a special order.

A flammable, toxic, colorless gas used primarily as a p-type dopant for the deposition of epitaxial and amorphous silicon and as a component in the CVD of BPSG (borate-phosphate-silicate-glass) coatings.

A flammable, toxic, colorless gas used for the deposition of epitaxial and amorphous germanium  and silicon - germanium alloys.  Digermane is only shipped as a concentrated mixture in hydrogen,  argon, helium or nitrogen to minimize the possibility of auto-deflagration.

A flammable, toxic, colorless gas used for the deposition of epitaxial and amorphous silicon - germanium alloys, and as a component for PECVD of (Si,Ge)O2 films with controllable refractive index for photonic applications.

A flammable, colorless gas that is normally shipped as a liquefied gas. Methylsilane is used in the epitaxial CVD of Si-Ge-C films. Methylsilane is usually supplied as a pure liquefied gas, or in mixtures with hydrogen, argon, helium or nitrogen.

A pyrophoric, toxic, colorless gas used primarily for the MOCVD of compound phosphides, the PECVD of phosphate-silicate-borate passivation coatings and the doping of crystalline and amorphous silicon. Phosphine is usually shipped as a liquefied compressed gas.

A pyrophoric, colorless gas.  Silane is used for CVD of epitaxial silicon and silicon alloys and PECVD of amorphous silicon and silicon based dielectrics.

A flammable, toxic, colorless, non-corrosive, pyrophoric liquid. Trisilane is used for deposition of poly silicon and silicon-based alloys. It is shipped as a liquefied gas, with an inert “pad” of about 5 psig.

Voltaix has been appointed as a Certified Manufacturer of Silcore by ASM International, N.V. Silcore offers an unprecedented ease in control of SiGe or SiGe:C layer composition, greater uniformity of Si, SiGe and SiN layers and deposition of very thin, smooth films on all surfaces. It is a flammable, toxic, colorless, non-corrosive, pyrophoric liquid, shipped as a pyrophoric liquid, with an inert “pad” of about 5 psig.

A flammable, toxic, colorless gas used primarily as a source for the plasma assisted CVD of gettering coatings deposited on internal surfaces of Tokomak reactors. Also used as a substitute for diborane in deposition technologies for which the greater chemical stability of deuterated diborane presents a significant advantage.