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SENTECHModel RM 1000 and RM 2000 -Spectroscopic Reflectometery Tools

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SENTECH's RM 1000 and RM 2000 spectroscopic reflectometers are cutting-edge tools specifically designed for refractive index measurements and optical characterization of thin films. These instruments feature a precise single beam reflectance measurement mechanism, optimized through height and tilt adjustments and highly efficient light conduction optics. This ensures accurate and repeatable measurements, even on rough surfaces. The RM 1000 covers a spectral range from 410 nm to 1000 nm, whereas the RM 2000 spans from 200 nm to 1000 nm. Both models can be equipped with an optional x-y mapping stage and mapping software for high-resolution thickness mapping on microscale substrates. They support extensive material analysis capabilities, measuring film thicknesses ranging from 2nm to 100µm, and being versatile enough for applications in industries like microelectronics, optoelectronics, and biotechnologies. SENTECH’s proprietary FTPadv Expert software provides robust data acquisition, modeling, and automatic selection of sample models, making these reflectometers indispensable for advanced research and industrial applications.

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The spectroscopic reflectometer RM 1000/2000 features UV to NIR spectral range from 200 nm – 930 nm. The optical layout is optimied for light throughput for reliable measurements of n and k even on rough or curved surfaces. Precise height and tilt adjustment leads to accurate single beam reflectance measurements, stable day after day.
 

Push the limits for refractive index measurements

SENTECH reflectometers feature the most accurate single beam reflectance measurements by height and tilt adjustment of a sample and by high light conductance of optical layout, allowing repeatable measurements of n and k, measurements on rough surfaces as well as thickness measurements of very thin films.

UV to NIR spectral range

  • RM 1000          410 nm – 1000 nm
  • RM 2000          200 nm – 1000 nm

High-resolution mapping

The reflectometers RM 1000 and RM 2000 can optionally be equipped with an x‑y mapping stage and mapping software and an objective lens for small spot sizes.