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Vacuum Metrology IncModel AVCS3SD -Stationary Automatic Vacuum Calibration System

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The AVCS3SD is an advanced stationary automatic calibration system designed for precise verification and calibration of various vacuum gauges across a wide pressure range from 1.3x10-3 to 1.3x10+5 Pa (1x10-5 to 1000 Torr). It accommodates multiple gauge types, including Capacitance Manometers, Pirani, Piezo, Cold and Hot Cathode gauges, in compliance with ISO 3567:2011(E) standards. The system features high-accuracy, NIST or PTB traceable transfer standards, achieving precision of ±0.025%, and operates within a temperature-controlled environment. It integrates an automated pressure and process control system, supported by a robust Calibration Management Software suite, enhancing conformity with ISO and industry standards. The construction includes a stainless steel chamber with multiple ports, a dual-stage pumping system, and a cleanroom-compatible frame. The AVCS automation uses a PC for GUI and process control, and an Allen Bradley PLC for operating vacuum hardware and pressure loops, ensuring reliable and efficient calibration processes.
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The AVCS3SD Automated Vacuum Calibration System is designed for fast precision automatic, semiautomatic or manual calibration and verification of various vacuum gauges at pressures from 1.3x10-3 to 1.3x10+5 Pa (1x10-5 to 1000 Torr). The system provides calibration capabilities for Capacitance Manometers, Pirani, Piezo, Cold Cathode (Penning), Hot Cathode (Bayard-Alpert) and other types of gauges.

The system is compliant with the requirements of the ISO 3567:2011(E) standard, “Vacuum gauges – Calibration by direct comparison with a reference gauge”

The system incorporates 3 high-accuracy NIST or PTB traceable transfer standards with accuracy of up to ±0.025% (±zero and span), temperature regulated at 45°C; and fully automatic, patent pending, pressure and process control system, along with a Calibration Management Software.

Stainless Steel vacuum chamber incorporates 3 ports for the Transfer Standards and 3 Test Ports equipped with KF16 style flanges. All test and transfer standard ports incorporate automatic failsafe isolation valves. The two stage pumping system consists of a dry (scroll) backing pump and a Turbo molecular pump.

The system is built on a cleanroom compatible aluminum frame with all of the components mounted within the frame footprint. Frame has a built in casters and leveling pads.

AVCS automation consists of a PC running the GUI and process control and an Allen Bradley PLC responsible for operation of the vacuum hardware and pressure control loop.

AVCS offers a built in Calibration Management Software suite to ensure compliance with ISO 90XX, ISO/IEC 17025, ANSI Z540 and other industry specific quality standards.

High Accuracy Transfer Standards
up to 3, NIST or PTB traceable, with basic accuracy of up to ±0.025% of the reading


Number of Test Ports
3


Base Pressure
Less than 7x10-5 Pa (5x10-7 Torr)


Pressure Control Range
Fully Automatic Pressure Control from 1.3x10-3 to 1.3x10+5 Pa (1x10-5 to 1x10+3 Torr)


Pressure Control Resolution
Up to 0.01% of set point


Operating Modes
Automatic, Semi-Automatic, Manual, Service


Data Averaging
10 to 99 points


Thermal Transpiration Correction
On/Off for Standards and/or UUTs
(Calculations per Takaishi-Sensui formula)


Process/Calibration Gas
Nitrogen or Dry Air


Dry Pumping System
Scroll + Turbomolecular pumps


Fully Enclosed Cabinet
Eliminates temperature variations and removes the uncertainty contributions caused by the temperature drift.


Cleanroom Compatibility
Fully Compatible


ISO Compliance
Fully compliant with ISO 3567: Vacuum Gauges — Calibration by direct comparison with a reference gauge


Data and System Security
Secure databases for clear audit trail:

  • process recipes
  • calibration data
  • Event logger database

Calibration Management Software Suite

  • Create and Print Calibration Certificates
  • View and Track calibration history and Trends
  • Create and Save unlimited Calibration and UUT recipes

Power Requirements
110/230 VAC, 50/60 Hz, 15A