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TAPI - Model Mini ODS -Compact High-Purity Ozone Delivery Systems
The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all the required regulators and pneumatics. The Mini ODS is expandable to support additional ozone generators running independent processes that require different levels of ozone concentrations and flow rates. The system is easy to use and maintain. There are no consumables or requirements for preventive maintenance. The Mini ODS can also interface to a dissolved ozone analyzer typically required in wet processes. For added safety, it can be interlocked with Teledyne API’s multichannel ozone leak detectors and ozone destruct sub-systems.
- Compact design
- Produces O3 concentrations over 21% w/w
- 19 inch rack mountable or table top
- Low cost of ownership/no consumables
- Fully integrated solution including:
- High Purity Ozone Generator
- High Concentration Ozone Analyzer
- Closed Loop Servo Controller
- Oxygen MFC
- Nitrogen MFC
- Back Pressure Regulator
- Electro-pneumatic divert valve
- Ozone Concentration : Over 320 g/Nm3 or 21.0% w/w
- Ozone Flow Rate: Optimized for 1 slpm (other flow rates available)
- Ozone Outlet Pressure: 15 to 40 PSIG (typically set at 30 PSIG)
- Ambient Temperature: 5-35°C
- Feed Gas:
- Oxygen: Grade 6 or better
- Nitrogen: Grade 5 or better (for doping only)
- Cooling Water :
- Temperature: 17 to 20°C
- Flow Rate: Configuration dependent
- Setpoint Controller:
- Automatic Servo Loop Control
- User Programmable Setpoints
- Generator Power
- Gas Flow Rate
- O3 Concentration
- (controls up to two O3 Generators simultaneously and independently)
- Analyzers : UV O3 Gas Concentration(UV O3 Dissolved Concentration optional)
- Gas Flow Controllers : MFC for O2 and N2 included
- Regulator: Back Pressure Regulator included
- Display : 2 line x 40 character, VFD
- Analog I/O :
- 1x Analog Output, 0-5VDC,
- 1x Analog Input, 0-5VDC
- Digital I/O :
- RS-232C, bi-directional
- 2x Digital Inputs
- 2x Digital Outputs
- Power : 208 to 240 VAC, 1Ph or 3Ph
- Dimensions (WxHxD) : 19.0" x 13.7" x 18.0" (48 cm x 35 cm x 46 cm)
- Compliance : CE
- Warranty: 1 year
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
- Oxide growth
- Surface conditioning
- Particle cleaning
- Photoresist removal
- Ashing