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HiPaceModel 60 P with TC 110, DN 63 ISO-K -Turbo Molecular Pump

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Small yet powerful turbo molecular pump without Holweck-stage with a pumping speed of up to 64 l/s for N2. Integrated TC 110 drive electronics. Installation in any orientation. Simple and reliable system integration. Insensitive to dust. Extensive accessories expand the range of applications.

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  • Bearing: Hybrid
  • Compression ratio for Ar: 2 · 106
  • Compression ratio for H2: 2 · 102
  • Compression ratio for He: 3.5 · 102
  • Compression ratio for N2: 1 · 106
  • Connection flange (in): DN 63 ISO-K
  • Connection flange (out): DN 16 ISO-KF/G ¼"
  • Cooling method: Convection
  • Cooling method, optional: Air/Water
  • Cooling water flow: 75 l/h
  • Cooling water flow, max.: 75 l/h
  • Cooling water flow, min.: 75 l/h
  • Cooling water temperature: 5-25 °C | 41-77 °F | 278-298 K
  • Current, max.: 4,6 A
  • Electronic drive unit: with TC 110
  • Final pressure according to PNEUROP: < 1 · 10-6 hPa | < 7.5 · 10-7 Torr | < 1 · 10-6 mbar
  • Final pressure without gas ballast: < 1 · 10-6 hPa | < 7.5 · 10-7 Torr | < 1 · 10-6 mbar
  • Fore-vacuum max. for N2: 4 hPa | 3 Torr | 4 mbar
  • Gas throughput at final rotation speed for Ar: 0.83 hPa·l/s
  • Gas throughput at final rotation speed for H2: 55 hPa·l/s
  • Gas throughput at final rotation speed for He: 55 hPa·l/s
  • Gas throughput at final rotation speed for N2: 9.2 hPa·l/s
  • I/O interfaces: RS-485, Remote
  • Mounting orientation: Arbitrary
  • Operating voltage: V DC: 24 (± 5 %) V DC
  • Permissible radial magnetic field max.: 4 mT
  • Power consumption max.: 110 W
  • Protection degree: IP54
  • Pumping speed for Ar: 63 l/s
  • Pumping speed for H2: 28 l/s
  • Pumping speed for He: 48 l/s
  • Pumping speed for N2: 64 l/s
  • Rotation speed ± 2 %: 90,000 rpm | 90,000 min-1
  • Rotation speed variable: 50 – 100 %
  • Run-up time: 1 min
  • Sound pressure level: ≤48 dB(A)
  • Venting connection: G 1/8"
  • Weight: 2.2 kg | 4.85 lb