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PMS HPGPModel 101-C -Ultra High Purity Gas Particle Counter

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Increase yield with the ultra-high purity gas particle counter HPGP 101-C. Ensure smooth processes with the only reliable in-line contamination monitoring for process gases at line pressure up to 150 psig. The HPGP is compatible with oxygen, hydrogen, and most non-toxic gases and can be used in many reactive gas monitoring applications. Ticked bullet point Reduce start up and validation time. Ticked bullet point Extend uptime of tools and equipment. Ticked bullet point Increase quality with reduced contamination risks.

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Lower risks of contamination-related downtime and improve reliability and safety with HPGP 101-C. Be confident in the process control as the counter has a sensitivity range of 0.1 – 5.0 µm.

Fast Data and Validation

Prevent yield loss by identifying contaminants quickly before they impact products. And reduce time needed to startup and validate processes or systems.

Broad Applications

Ensure process control in a range of applications with data that reflects real process conditions, even in high-pressure processes. The HPGP 101-C can monitor gases up to 150 psig. Plus, you can reduce equipment needs for different applications within your process as this counter works with oxygen, hydrogen and most non-toxic gases. It can also be used in reactive gas applications where other technologies might not be suitable.

Sensitivity Range 0.1-5.0 µm

Increase yield and reduce contamination risk with the the detection range of 0.1-5.0 µm.

Collect and Report Data

Ensure compliance and easily analyze data with pairing the HPGP 101-C with our Particle Data System.

Provides reliable in-line contamination monitoring for process gases at line pressure

Without measurement there is no control
High-technology manufacturing processes often require high-purity gases. The HPGP 101-C provides reliable in-line contamination monitoring for process gases at line pressure. The HPGP is compatible with most non-toxic gases and can be used in many reactive gas monitoring applications.

The PDS-E (Particle Data System - Ethernet) instrument collects and reports data captured by the HPGP 101-C probe.

Reduced Cost

  • Speed qualification of process gas distribution systems
  • Detect particles in gases before they impact yield
  • Compatible with oxygen, hydrogen, and most non-toxic gases

Improved Process Control

  • Verify gas quality
  • Detect process upsets
  • Quantify impact of system changes
  • Accurate particle sizing
  • Facility Net data management soware for comprehensive data storage, management, reports, and alarms

Reliable

  • Passive cavity design requires infrequent maintenance
  • Inert gas purge ensures safety
  • Leakage of sample gas to vessel discontinues power to electronics
  • 0.1 µm sensitivity at 0.1 SCFM
  • 8 particle channels
  • Line pressures from 40 to 150 psig
  • Passive laser cavity
  • Parallel processing array detector system
  • Safety containment vessel
  • Oxygen and hydrogen compatibility
  • CE and RoHS 2 compliant
  • Qualification of gas distribution systems
  • Process gas monitoring
  • Reactive gas monitoring

HPGP 101-C

  • Size channels: 8 channels with thresholds at: 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0 µm
  • Sample rate: 0.1 SCFM (2.8 LPM) (=total volumetric flow rate)
  • Counting efficiency*: > 50% at 0.14 µm
  • Zero count level: < 2/3 or < 0.2/min
  • Maximum concentration**: 3,000/3
  • Laser type: HeNe
  • Calibration: Traceable to the US National Institute of Standards and Technology (NIST).
  • Power: 100, 115, 220 – 230, or 230 – 240 V, 50 – 60 Hz, 0.5 A
  • Environment: Temperature: 32 – 113 °F (0 – 45 °C). Humidity: non-condensing. Maximum altitude: 9,842  (3,000 m).
  • Dimensions (l, w, h): 26 x 8 x 9 in (66 x 20 x 22 cm)
  • Weight: 45 lb (20.4 kg)
  • Compliance: CE, RoHS 2

PDS-E (Data Interface)

  • Number of sensors: Supports 1 HPGP unit per PDS-E
  • Sampling interval: 1 sec to 8 hr
  • Computer interface: RS-232, bi-directional; Ethernet (via PMS protocol, Modbus, or OPC)
  • Power: 100 – 240 VAC, 50 – 60 Hz, 0.63 A
  • Environment: Temperature: 32 – 113 °F (0 – 45 °C), Humidity: non-condensing, Maximum altitude: 9,842  (3,000 m)
  • Dimensions (l, w, h): 7 x 8.5 x 12.5 in (18 x 22 x 32 cm)
  • Weight: 11.5 lb (5.2 kg)

* Allow ± 5% for variations in sample flow.
** Greater than 90% accuracy (less than 10% coincidence loss) at maximum recommendation ambient concentration.
Patents apply: United States – 4,798,465, 4,893,928, and 4,594,715. Japan – 2,786,187, and 2,554,614.
Germany – 3,712,665C2, 3,930,642, and 3,485,749.4. Canada – 1,228,148. UK – EP142815