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Hiden - Model EQS -Unique Electrostatic Quadrupole SIMS Detector
The Hiden EQS is a unique electrostatic quadrupole SIMS detector, specialised for the mass spectral analysis of both positive (+ve) and negative (-ve) secondary ions from solid samples. With its integrated 45° electrostatic sector ion energy analyser, the Hiden EQS can simultaneously analyse ion energy with a resolution of 0.2 electron volts (eV). This makes it one of the most versatile tools for ion analyses in a raft of mass spectrometry applications, including:
- Extending the sensitivity range of XPS by a factor of over 1000
- Dynamic and static SIMS
- Focussed ion beam (FIB) mass spectrometry
- Secondary neutral mass spectrometry (SNMS)
- Sputter depth profiling
- Sputtered ion and neutral mass/energy analysis
Tools for Ion Analysis from Hiden Analytical
A popular bolt-on fitting for after-market systems, ideal as an add-on for XPS systems and focused ion beam FIB microscopy systems for example, the Hiden EQS offers high sensitivity and optional differential pumping to meet the imaging, depth profiling, and mass spectra requirements of users in a range of applications.
If you need more information about integrating our electrostatic quadrupole SIMS tool into your existing XPS system, FIB microscopy system or if you require a ground-up solution for your ion analyses, simply contact a member of the Hiden Analytical team today.
- High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range
- Raster Control for enhanced depth profiling and imaging with integrated signal gating
- 45° Electrostatic Sector analyser, scan energy at 0.05 eV increments/ 0.25eV FWHM
- Minimum perturbation of ion flight path & constant ion transmission at all energies
- Triple filter Quadrupole, mass options to 5000 amu
- Penning Gauge and interlocks to provide over pressure protection
- Differentially pumped option for use in high pressure environments
- MASsoft control via RS232, RS485 or Ethernet LAN
- Easily interfaced to existing systems
With high transmission rates and an integrated 45° electrostatic sector energy analyser, the Hiden EQS (electrostatic quadrupole) is our most trusted SIMS detector for surface analysis applications of all scales. See the table below for detailed specifications:
- Mass range: 300, 510 or 1000 amu
- Ion analysis: Positive and negative ions
- Ion energy analysis: 100eV, 1000eV option,
- Sensitivity: > 106 counts/second per nanoamp for Aluminium
- Residual gas analysis mode- RGA: Leak detection and chamber vacuum analysis
- SIMS – Secondary Ion Mass Spectrometry: Yes
- Analysis of ions ejected from sample surface: Yes (primary ions of oxygen, argon or caesium)
- FIB-SEM microscopy SIMS: Yes
- Fine-focus electron beam microscope compatible: Yes (E.g. FIB-SEM – Zeiss Auriga 60)