Vacuum Metrology Inc - Model VMS2HA -Portable High Accuracy Automatic Calibration System
The VMS2HA is a portable, high accuracy automatic calibration system developed by Vacuum Metrology Systems. It's designed for onsite calibration of vacuum gauges across a range of industries such as semiconductor, pharmaceutical, and aerospace. The system integrates a Calibration Management Software suite, facilitating compliance with standards like ISO 90XX, ISO/IEC 17025, and ANSI Z540. It employs up to three high-accuracy NIST or PTB traceable vacuum transfer standards, featuring a basic accuracy of ±0.025%. The system’s repeatable control resolution can reach up to 0.01% of the set pressure point, ensuring precision. The VMS2HA accommodates existing transfer standards and is compatible with ISO-3567 requirements for vacuum gauge calibration. It offers automatic, semi-automatic, and manual operating modes, and includes a secure database for audit trails. Built to minimize temperature-induced uncertainties, it is suitable for cleanroom environments, operating within a pressure range from 1.3x10-3 to 1.3x10+5 Pa.VMS2HA (High Accuracy) is a High Accuracy model from a new family of calibration systems developed by Vacuum Metrology Systems. VMS2 family design builds on experience and customer feedback gained during development and production of our AVCS system.
VMS2HA is a truly portable fully automatic calibration system for onsite calibration of vacuum gauges for semiconductor, pharmaceutical, aerospace and many other industries. In addition to portability and unsurpassed accuracy, VMS2HA offers a built in Calibration Management Software suite to ensure compliance with ISO 90XX, ISO/IEC 17025, ANSI Z540 and other industry specific quality standards.
The system utilizes up to 3 high accuracy NIST or PTB traceable vacuum transfer standard with basic accuracy of up to .025% . The standards coverage can be custom configured to provide the best accuracy throughout the required calibration pressure range. The proprietary pressure control algorithm allows for the repeatable control resolution of up to 0.01% of the set point.
VMS2HA system is fully compatible with the requirements of ISO-3567.
VMS2HA can be configured to utilize the Transfer Standards that your company already own.
High Accuracy Transfer Standards
up to 3, NIST or PTB traceable, with basic accuracy of up to ±0.025% of the reading
Number of Test Ports
3
Base Pressure
Less than 7x10-5 Pa (5x10-7 Torr)
Pressure Control Range
Fully Automatic Pressure Control from 1.3x10-3 to 1.3x10+5 Pa (1x10-5 to 1x10+3 Torr)
Pressure Control Resolution
Up to 0.01% of set point
Operating Modes
Automatic, Semi-Automatic, Manual, Service
Data Averaging
10 to 99 points
Thermal Transpiration Correction
On/Off for Standards and/or UUTs
(Calculations per Takaishi-Sensui formula)
Process/Calibration Gas
Nitrogen or Dry Air
Dry Pumping System
Scroll + Turbomolecular pumps
Fully Enclosed Cabinet
Eliminates temperature variations and removes the uncertainty contributions caused by the temperature drift.
Cleanroom Compatibility
Fully Compatible
ISO Compliance
Fully compliant with ISO 3567: Vacuum Gauges — Calibration by direct comparison with a reference gauge
Data and System Security
Secure databases for clear audit trail:
- process recipes
- calibration data
- Event logger database
Calibration Management Software Suite
- Create and Print Calibration Certificates
- View and Track calibration history and Trends
- Create and Save unlimited Calibration and UUT recipes
Power Requirements
110/230 VAC, 50/60 Hz, 15A