Solayer GmbH
Versatile Cluster Deposition Tool
FromSolayer GmbH
Solayer`s cluster tool is a fully automated deposition and analysis system that is used in R & D, pilot and small scale production. The system has a central distribution chamber and robot handler to process thin film layers based on PVD, PECVD, ALD, PLD, IBAD, XPS, XRF, AES, SPM, MOKE and FLA.
Most popular related searches
- tool design & development
- Flexibility to modify tool structure
- Wide range of thin-film technologies
- Variety of substrate shapes and materials
- Scalable for R & D, pilot and mass production
- Integration of advanced processes