Solayer GmbH products

The vertical coating equipment is based on modular concept for PVD and PECVD technologies. The pre-assembled modules with integrated power pack provide fast and error-free installation. The unique substrate transportation reduces cost of ownership, footprint and maintenance.

Solayer`s cluster tool is a fully automated deposition and analysis system that is used in R & D, pilot and small scale production. The system has a central distribution chamber and robot handler to process thin film layers based on PVD, PECVD, ALD, PLD, IBAD, XPS, XRF, AES, SPM, MOKE and FLA.

In the light of the changing industry landscape generated by emerging technology device applications, SOLAYER GmbH offers a precision optical coating production tool engineered based on these tight technical requirements. Further innovations in the recent version of the AVIOR M-300 not only guarantees high throughput and reliable mass production of precision optics, but also keeps within the outperforming film characteristics such as uniformity, thermal stability and non-absorption to moisture.

Perfectly suited for small and medium production lots as well as for the market entry into sputter-coated optical films. We meet you at the point of your needs - whether you want to enter into sputtering technology or increase your production capabilities step-by-step. Solayer’s AVIOR S-100 is an economic way to offer our customers high-quality sputter-coated films for precision optics.

Alioth is a versatile inline production equipment. Qualified for a wide field of applications ranging from large quantities of small substrates through to single large-area substrates, Alioth serves the need for flexibility and sustainability in the production of optical coatings. The platform is designed to produce dielectric coatings, metal-dielectric coatings as well as TCO coatings.

The vertical coating equipment is based on modular concept for PVD and PECVD technologies. The pre-assembled modules with integrated power pack provide fast and error-free installation. The unique substrate transportation reduces cost of ownership, footprint and maintenance.

The horizontal coating tool is manufactured for high throughput requirements. With a linear transfer system and parallel multi-process operation, the equipment also offers substrate cleaning, etching, deposition and annealing based on combined processes of sputtering, PECVD, ALD and FLA. 

The modular scalable platforms  are designed to meet the requirements of 24/7 production environments for high-precision layers. The fully-automated coaters allow sputter deposition of high-quality layers that offer outstanding process flexibility for sophisticated stack designs.

Solayer`s cluster tool is a fully automated deposition and analysis system that is used in R & D, pilot and small scale production. The system has a central distribution chamber and robot handler to process thin film layers based on PVD, PECVD, ALD, PLD, IBAD, XPS, XRF, AES, SPM, MOKE and FLA.

The magnetron-based deposition system features a co-sputter arrangement of up to 6 sputter sources in one / two chambers (independent DC or RF). With automatic loading and advanced angle / T-S position adjustment, the deposition of gradient or mixed layers opens a wide range of applications.