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Vertical Inline Coating Tool

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The vertical coating equipment is based on modular concept for PVD and PECVD technologies. The pre-assembled modules with integrated power pack provide fast and error-free installation. The unique substrate transportation reduces cost of ownership, footprint and maintenance.

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  • Specific solutions according to customer requirement
  • High substrate throughput
  • Highest target utilization
  • Fastest target exchange
  • High deposition rates
  • Safe and reliable production performance
  • Very high uniformity
  • Prepared for upgrades to meet future demands
  • Integration of advanced processes