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Nordson TEST & INSPECTION
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  5. WaferSense - Model AGS - Auto Gapping ...

WaferSense - Model AGS -Auto Gapping System

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Achieve exactly the gap you need, whether you need to set a gap that is perfectly parallel or slightly tilted to achieve the best uniformity. The three AGS sensors each report separate readings from chambers at process pressure in numerical and graphical form to let you achieve exactly the gap you need.

Improve tool-to-tool process uniformity with objective and repeatable gap adjustments.

Have peace of mind by taking the human variable out of adjusting your equipment with objective (numerical) measurements. Make the right adjustments time after time with numerical and graphical displays. Improve tool-to tool process uniformity by enabling anyone to set the same gap across the tools.

Reduce equipment calibration time through live feedback.

See the effects of adjustments in real-time with CyberSpectrum™ software’s graphical user interface, provided with AGS. Numerical and graphical measurements can be taken from inside an evacuated process chamber with a clear indication when equipment settings are within tolerance.

Speed setups, maintenance and troubleshooting with automatic handling.

Available in 200mm and 300mm wafer sizes.

  • Wafer-shaped : Available in 200mm and 300mm wafer sizes.
  • Wireless : No wires that can break after repeated use and AGS will never be misaligned by strained wires. Transmit data in real-time.
  • Highly accurate : Measures gaps with +-25 micron accuracy within 4 hours of field offset calibration. Gap resolution +-5 microns.
  • Easy-to-use software : CyberSpectrum software displays numerical and graphical information. Each graphic is color coded to make it easier to see when the gap is above, below or within the user-defined target gap range. CyberSpectrum lets you log time-stamped measurements to a CVS file for documentation and/or analysis.