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EBARA - Model ESR - Water-Cooled Dry ...

EBARA - Model ESR -Water-Cooled Dry Vacuum Pump

FromEBARA Precision Machinery Europe GmbH (EPME)

Water-cooled dry vacuum pump ESR with superior corrosion resistance. The ESR is perfect for medium to harsh applications with low ultimate pressure. The variable pumping speeds ensure a highly flexible usage. Low noise level and low vibration are key features of the ESR series.

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High corrosion resistance
High flexbility
Nickel resistent
Low cost of ownership
Low noise level
Low vibration

Multistage lobe design engineered for application in clean and medium harsh processes as Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch
Adjustable pumping speed by RPM variation
High pump operating temperature preventing condensation and clogging
High performance brushless DC motors
Low noise and low vibration
Thoroughly corrosion resistant material

EBARA - Model ESR -Water-Cooled Dry Vacuum Pump

Core Benefits

Technical Characteristics: