Hazardous Gas Monitoring throughout the Semiconductor Manufacturing Facility - Manufacturing, Other
Semiconductor manufacturing facilities employ a number of hazardous gases in their production processes. Whenever these gases are stored, distributed or used in manufacturing processes, there exists the potential for a hazardous condition.
Examples of semiconductor applications
Parts per million detection in ventilated gas cabinets, enclosures, process equipment chases and clean rooms,
Flammability monitoring of LFL/LEL levels in and around process tools
Flammability monitoring of LFL/LEL levels to protect Thermal Oxidizers
Area monitoring for toxics and combustibles in storage areas, distribution, delivery piping and equipment chases
Hydrogen monitoring of CVD process tools