Beneq products

ALD system that perfectly balances uniformity and throughput. The Beneq P400A is built specifically to coat different types of substrates in an optimized batch size – large enough to offer significant capacity, but small enough to maintain excellent uniformity within batches and short cycle times. Our customers use the P400A for optical coatings and applications where ALD is used on glass or metal sheets.

ALD system for large batches and large parts. The Beneq P800 is specifically designed to coat big parts of complex shapes or large batches of smaller parts. Our customers use the P800 for optical coatings, anticorrosive coatings of semiconductor equipment parts, and various applications where ALD is used on glass or metal sheets.

The world’s largest ALD system for your biggest substrates. The Beneq P1500, our biggest ALD system, is built specifically to coat sizeable sheets and complex parts. It is also made to deliver increased throughput for batches of smaller components. Our customers use the P1500 for optical coatings on large diameter substrates, anticorrosive coatings of semiconductor equipment parts, and various applications where ALD is used on glass or metal sheets.

The ultimate platform for ALD research and batch production. The TFS 500 is ideal for diverse use in thin film coating applications. Being the first Beneq reactor model, has proven its case as a versatile tool for both in-depth ALD research and robust batch processing. The TFS 500 is an ideal tool for multi-project environments.

Compact, scalable. Your perfect ALD research partner at EUR 130 000. A premium ALD reactor packaged in a compact enclosure. Ergonomically designed from the ground up for performance and ease of use. Modular design allows for quick upgrades and maintenance.

Beneq C2R is the spatial ALD member of our cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level – for the first time, PEALD can be used in high volume manufacturing. Because of the plasma enhanced rotary ALD process, the Beneq C2R is ideal for thick ALD films, even up to several micrometers.