Beneq products

Spatial ALD

Beneq - Model C2R - Ultra-Fast High Precision Spatial Coatings Equipment

Beneq C2R is the spatial ALD member of our cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level – for the first time, PEALD can be used in high volume manufacturing. Because of the plasma enhanced rotary ALD process, the Beneq C2R is ideal for thick ALD films, even up to several micrometers.