Beneq products

The ultimate platform for ALD research and batch production. The TFS 500 is ideal for diverse use in thin film coating applications. Being the first Beneq reactor model, has proven its case as a versatile tool for both in-depth ALD research and robust batch processing. The TFS 500 is an ideal tool for multi-project environments.

Compact, scalable. Your perfect ALD research partner at EUR 130 000. A premium ALD reactor packaged in a compact enclosure. Ergonomically designed from the ground up for performance and ease of use. Modular design allows for quick upgrades and maintenance.