Brooks Instrument products

Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable output on the other side. That’s the advanced simplicity you get with the SLA5800 Series digital mass flow controllers and meters.

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

GP200 Series is the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for advanced Etch and Deposition processes in semiconductor manufacturing.

Embedded diagnostics leverage real-time EtherCAT data acquisition capabilities. Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements. Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects. Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery.

Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.

Engineered to work where you need it: Choose the MT3809 variable area flow meter for all the high-pressure, high-temperature VA flow measurement and control requirements on your next project. Proven to deliver reliable, repeatable gas and liquid flow measurement and control in thousands of installed locations, the MT3809 is practical and economical, making it the “go-to” choice for Engineering Procurement Contractors (EPC) and major industrial facilities worldwide. The MT3809G configuration features a digital LCD display with local operator interface, providing valuable process outputs such as totalization and alarm signals. It also lets users make parameter changes without removing the cover, which means changes can be made even in hazardous areas.