Voltaix LLC products

A pyrophoric, colorless, assumed to be toxic gas, used as a stable boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition.  Trimethylboron is usually shipped as a pure liquefied gas, or in mixtures with argon, helium, hydrogen, nitrogen or silane.  Also available enriched in B-10 or B-11 as a special order.

A flammable, toxic, colorless gas used primarily as a p-type dopant for the deposition of epitaxial and amorphous silicon and as a component in the CVD of BPSG (borate-phosphate-silicate-glass) coatings.