Voltaix LLC products

A pyrophoric, colorless gas.  Silane is used for CVD of epitaxial silicon and silicon alloys and PECVD of amorphous silicon and silicon based dielectrics.

A flammable, toxic, colorless, non-corrosive, pyrophoric liquid. Trisilane is used for deposition of poly silicon and silicon-based alloys. It is shipped as a liquefied gas, with an inert “pad” of about 5 psig.

Voltaix has been appointed as a Certified Manufacturer of Silcore by ASM International, N.V. Silcore offers an unprecedented ease in control of SiGe or SiGe:C layer composition, greater uniformity of Si, SiGe and SiN layers and deposition of very thin, smooth films on all surfaces. It is a flammable, toxic, colorless, non-corrosive, pyrophoric liquid, shipped as a pyrophoric liquid, with an inert “pad” of about 5 psig.