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Kla Environmental Equipment & Supplies
16 equipment items found
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The Archer™ 750 overlay metrology system provides accurate feedback of on-product overlay error for fast technology ramps and stable production of leading-edge memory and logic devices. Wavelength tunability with 10nm resolution delivers accurate and robust overlay error measurements in the presence of production process variations. With productivity levels typically only seen with ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The SensArray Automation in situ process management package provides a fast automated collection of process tool chamber temperature measurements while also providing semi-automated functionality to support fab startups. The SensArray Automation package includes the AS1000 automation base station, which is compatible with all 300mm wireless SensArray products, the overhead track (OHT) compatible ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The EtchTemp series of in situ wafer temperature measurement systems, available in both 300mm and 200mm configurations, captures the effects of the plasma etch process environment on production wafers under real process conditions. The EtchTemp-HD measurement system includes high sensor density enabling across-wafer temperature monitoring that strongly correlates with CD uniformity control for ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The HighTemp-400 in situ wafer temperature measurement system, available in both 300mm and 200mm configurations, is designed to optimize and monitor advanced film processes (FEOL and BEOL ALD, CVD and PVD) and other elevated temperature processes. The HighTemp-400 wireless wafer measures process tool thermal uniformity, providing a complete picture of temporal and spatial temperature data ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The C30x Series broadband plasma optical defect inspectors enable systematic defect discovery and latent reliability defect detection for chip manufacturing for the automotive, IoT, 5G, consumer electronics and industrial (military, aerospace, medical) ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The 3935 and 3920 EP broadband plasma defect inspection systems support wafer-level defect discovery, yield learning and inline monitoring for ≤5nm logic and leading-edge memory design nodes. With a light source that produces super resolution deep ultraviolet (SR-DUV) wavelength bands, low noise sensors and advanced algorithms, the 3935 and 3920 EP provide high sensitivity capture of unique ...
Manufactured by:KLa Systems, Inc. based inAssonet, MASSACHUSETTS (USA)
KLa Systems is in a unique position to assist industries in meeting the challenges of production expansion and/or optimizing energy usage in their wastewater treatment facility. Out Slot Injector™ aeration system can easily retrofit all types of coarse and fine bubble diffuser systems, including conventional jet aeration systems. Higher (15-60%) oxygen transfer rates can be achieved using ...
Manufactured by:KLa Systems, Inc. based inAssonet, MASSACHUSETTS (USA)
KLa Systems floating Effluent Decanters are used to draw clarified liquid from near the liquid surface of sequencing batch reactors and aerobic digesters. The design is both simple and rugged, constructed of Type 304L stainless steel for the weir, draw-off pipe, swing joint support, and stop supports. The floats used are high-impact, UV stabilized polyethylene with closed cell polyurethane foam. ...
Manufactured by:KLa Systems, Inc. based inAssonet, MASSACHUSETTS (USA)
Jet Mixers are widely used in both municipal and industrial wastewater treatment facilities to blend the plant influent and suspend light organic solids in circular equalization tanks. Other applications for these powerful hydraulic mixers include mixing anoxic tanks and anaerobic reactors with the latter application being for industrial waste streams only. Jet mixers are the technology of choice ...
Manufactured by:KLa Systems, Inc. based inAssonet, MASSACHUSETTS (USA)
Jet Aerators transfer oxygen by simultaneously introducing large volumes of high kinetic energy liquid and air through a series of jet nozzles. The high velocity liquid exits the inner, primary jet and rapidly mixes with the incoming air in the outer jet. This intense mixing and high degree of turbulence in the gas/liquid cloud travels outward from the jet along the basin floor prior to the ...
Manufactured by:KLa Systems, Inc. based inAssonet, MASSACHUSETTS (USA)
Water Environment Research Foundation (WERF) studies show that fine-pore diffusers have reduced oxygen transfer performance and increased pressure requirements over time due to clogging, and the biggest drop-off is in the first 24 months of ...
Manufactured by:KLa Systems, Inc. based inAssonet, MASSACHUSETTS (USA)
The Kla Systems Slot Injector system is a superior jet aeration system that is specifically applied to industrial biological treatment processes where fine screening is a standard pretreatment operation in both conventional and advanced air activated sludge applications. First introduced in 1979 by Bayer AG, the Slot Injector™ is similar to a modern jet aerator but uses a slot-shaped ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The ATL100 (Accurate Tunable Laser) scatterometry-based overlay metrology system provides overlay control for development and high volume manufacturing at ≤7nm design nodes. Tunable laser technology with 1nm resolution paired with real-time Homing maintains high overlay accuracy in the presence of production process variations. The ATL100 supports a diverse range of scatterometry overlay ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The Surfscan SP7XP unpatterned wafer inspection system identifies defects and surface quality issues that affect the performance and reliability of leading-edge logic and memory devices. It supports IC, OEM, materials and substrate manufacturing by qualifying and monitoring tools, processes and materials, including those used for EUV lithography. Using a DUV laser and optimized inspection modes, ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The Surfscan SP A2 and Surfscan SP A3 unpatterned wafer inspection systems identify defects and wafer surface quality issues that affect the performance and reliability of chips manufactured for the automotive, IoT, 5G, consumer electronics, and industrial (military, aerospace, medical) ...
Manufactured by:KLA Corporation based inMilpitas, CALIFORNIA (USA)
The 2965 and 2950 EP broadband plasma defect inspection systems provide advancements in optical defect inspection, enabling discovery of yield-critical defects on ≤5nm logic and leading-edge memory design ...